
The wavelength-dispersive spectrometry - Electron Probe Microanalyzer (WDS-EPMA) is the reference technology for the quantitative chemical analysis of major and trace elements (> 100 parts per million), from Be to U, at spatial resolutions of the micrometer. Despite the advent of other technologies for microanalysis, EPMA is still unsurpassed for its versatility and analytical performance on light and ultra-light elements, for the non-destructiveness of the electron beam, for the extremely reduced volumes of investigation, and for the efficiency in collecting large elemental 2D maps of the sample.
Contacts
Equipment

The Electron Microprobe Laboratory is part of the UNITECH COSPECT - Comprehensive Substances characterization via advanced sPECTtroscopy
Responsabile Tecnico dott. Enrico Caneva
JEOL 8200 Super Probe
Main specifications
Filament: Precentered tungsten (W) hairpin type
Accelerating voltage: 200 V to 30 kV (100 V steps)
Probe current range: 10-12 to 10-5 Å
Secondary detector: Collector electrode, scintillator, light guide, PMT
Backscattered detector: Si P-N junction
Magnification: 40× to 300,000×
Maximum single image resolution: 2048 × 2048 pixels (net-map possible)
WDS - X-ray SPECTROMETER SYSTEM
Detectable element range: 4Be to 92U
Detectable wavelength: 0.087 to 9.3 nm
Number of WDS spectrometers: five
Atomic number resolution on BSE (Z): less/equal than 0.1 (CuZ)
Quantification software of X-ray mapping via ZAF on pixel: possible
Chemical analyses of Rare Earth minerals and rare minerals using a protocol made by
V. Diella, National Research Council, Institute for the Dynamics of Environmental Processes
EDS - X-ray SPECTROMETER SYSTEM
Detectable element range: 11Na to 92U
Energy resolution (FWHM): 144 eV or better
CL -C CATHODOLUMINESCENCE SYSTEM
OMT: Transmission Illuminator
OM: Optical microscope
CCD color camera
SPECIMEN STAGE
Maximum specimen size: 100—100—20 (H) mm
Analyzable area: 80—80 mm
Working distance (WD): 11 mm
Driving step sizes Half-step 0.5 μm/step, Micro-step 0.02 μm/step
SOFTWARE
EPMA operation software
EDS operation software
WDS/EDS quantitative analysis software
Phi-Rho-Z Quantitative Analysis Program
WDS/EDS mapping
WDS/EDS map data analysis (including combination mapping function)
Activity
Chemical and textural analyses on Earth Materials Chemical and textural characterization on metals and alloys, steels, ceramics composites, and other artificial materials.